OX400

The measurement principle of the OX400 low-concentration zirconia oxygen analyzer is based on the oxygen concentration cell effect: its core sensor is a zirconia solid electrolyte tube heated to approximately 750°C. Platinum electrodes are coated on both sides of the tube wall, each in contact with a reference gas of known oxygen concentration (usually air) and the sample gas to be measured. When the oxygen partial pressures on both sides differ, oxygen ions migrate through the zirconia lattice from the high concentration side to the low concentration side, generating an electromotive force between the two electrodes that is logarithmically related to the oxygen concentration difference (according to the Nernst equation). By precisely measuring this potential and applying temperature compensation, the low-concentration oxygen content in the sample gas can be deduced.

The OX400 can be used for control and monitoring in various semiconductor applications, environmental control, inert gas leak detection, and other processes. For example, it is used for oxygen concentration control in semiconductor diffusion furnaces and drying furnaces, as well as in LCD manufacturing processes; for airflow in tin soldering furnaces and reflow soldering furnaces, and for oxygen concentration control in glove boxes and gas production processes used in electronics manufacturing; it measures oxygen concentration to prevent dust explosions during powder transportation.